Scientists and engineers met to identify research and standards that will benefit users and manufacturers (mfrs.) of mass flow controllers (MFCs) and related equip. Most attendees represented companies closely associated with the semiconductor industry, including mfrs. of MFCs, of process tolls, and of semiconductor devices. They were asked to identify the tech. problems limiting the productivity of the U.S. semiconductor mfg. industry, and prioritize the ways these problems can be resolved. Topics: flow meter performance; standards and calibration; gas properties; and alternatives to thermal mass flow controllers. The attendees identified recommended tasks which will guide research on gas properties, flow standards, and flow measurement techniques. Ill.