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Lädt ... Micro- and nanopatterning polymers developed from a symposium ... at the 214th ACS national meeting, Las Vegas, Nevada, September 7 - 11, 1997von Itō Hiroshi 伊東広
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Use of polymers is widespread in the electronics industry, both in manufacturing integrated circuits and as components in the completed devices. In addition to providing an update in conventional microlithography technology, Micro- and Nanopatterning Polymers describes new patterningtechniques involving block copolymers, direct deposition of metal oxides and other materials, and image-wise chemical deposition. It illustrates the challenges and opportunities in designing ArF excimer laser resists in the next generation of lithographic technology. The book includes discussions ofmaterial design alternatives, acid generator chemistries, and acid diffusion mechanisms in chemically amplified resists, which have now replaced novolac/diazoquinone resists in device manufacturing. Providing insight into the most recent breakthroughs in nano-technology, this unique book is animportant step in the development of integrated circuits. Keine Bibliotheksbeschreibungen gefunden. |
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Google Books — Lädt ... GenresMelvil Decimal System (DDC)621.381Technology Engineering and allied operations Applied physics Electrical, magnetic, optical, communications, computer engineering; electronics, lighting Electronics, communications engineering ElectronicsKlassifikation der Library of Congress [LCC] (USA)BewertungDurchschnitt: Keine Bewertungen.Bist das du?Werde ein LibraryThing-Autor. |